SEC Seal
SEC Banner
Search the Next-Generation EDGAR System
Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-20-005335
Filing Date
2020-05-06
Accepted
2020-05-06 11:46:59
Documents
70
Period of Report
2020-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20200331x10q.htm 10-Q 1688494
2 EX-31.1 acls-20200331ex311254b5b.htm EX-31.1 13355
3 EX-31.2 acls-20200331ex312168d48.htm EX-31.2 13379
4 EX-32.1 acls-20200331ex3219ed32a.htm EX-32.1 6793
5 EX-32.2 acls-20200331ex3225949e1.htm EX-32.2 5983
  Complete submission text file 0001558370-20-005335.txt   6012087

Data Files

Seq Description Document Type Size
6 EX-101.INS acls-20200331.xml EX-101.INS 1284383
7 EX-101.SCH acls-20200331.xsd EX-101.SCH 39318
8 EX-101.CAL acls-20200331_cal.xml EX-101.CAL 67799
9 EX-101.DEF acls-20200331_def.xml EX-101.DEF 113093
10 EX-101.LAB acls-20200331_lab.xml EX-101.LAB 382235
11 EX-101.PRE acls-20200331_pre.xml EX-101.PRE 264902
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 20851750
SIC: 3559 Special Industry Machinery, NEC