EDGAR Filing Documents for 0001104659-12-055070

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:

SEC Accession No. 0001104659-12-055070

Filing Date

2012-08-07

Accepted

2012-08-07 12:05:40

Documents

Period of Report

2012-06-30

Document Format Files

Seq	Description	Document	Type	Size
1	10-Q	a12-13741_110q.htm	10-Q	511866
2	EX-10.2	a12-13741_1ex10d2.htm	EX-10.2	29183
3	EX-10.3	a12-13741_1ex10d3.htm	EX-10.3	28768
4	EX-10.4	a12-13741_1ex10d4.htm	EX-10.4	57016
5	EX-10.5	a12-13741_1ex10d5.htm	EX-10.5	121346
6	EX-31.1	a12-13741_1ex31d1.htm	EX-31.1	13669
7	EX-31.2	a12-13741_1ex31d2.htm	EX-31.2	13632
8	EX-32.1	a12-13741_1ex32d1.htm	EX-32.1	5309
9	EX-32.2	a12-13741_1ex32d2.htm	EX-32.2	5308
	Complete submission text file	0001104659-12-055070.txt		3241885

Data Files

Seq	Description	Document	Type	Size
10	XBRL INSTANCE DOCUMENT	acls-20120630.xml	EX-101.INS	295810
11	XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT	acls-20120630.xsd	EX-101.SCH	31112
12	XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT	acls-20120630_cal.xml	EX-101.CAL	47439
13	XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT	acls-20120630_lab.xml	EX-101.LAB	420249
14	XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT	acls-20120630_pre.xml	EX-101.PRE	204041
15	XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT	acls-20120630_def.xml	EX-101.DEF	112111

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915

Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001

AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)