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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001047469-14-001681
Filing Date
2014-03-03
Accepted
2014-03-03 15:56:07
Documents
15
Period of Report
2013-12-31

Document Format Files

Seq Description Document Type Size
1 10-K a2218577z10-k.htm 10-K 1239664
2 EX-10.12 a2218577zex-10_12.htm EX-10.12 9749
3 EX-10.13 a2218577zex-10_13.htm EX-10.13 11842
4 EX-21.1 a2218577zex-21_1.htm EX-21.1 4456
5 EX-23.1 a2218577zex-23_1.htm EX-23.1 4451
6 EX-31.1 a2218577zex-31_1.htm EX-31.1 8031
7 EX-31.2 a2218577zex-31_2.htm EX-31.2 8035
8 EX-32.1 a2218577zex-32_1.htm EX-32.1 4347
9 EX-32.2 a2218577zex-32_2.htm EX-32.2 4354
  Complete submission text file 0001047469-14-001681.txt   10057466

Data Files

Seq Description Document Type Size
10 EX-101.INS acls-20131231.xml EX-101.INS 1417127
11 EX-101.SCH acls-20131231.xsd EX-101.SCH 75554
12 EX-101.CAL acls-20131231_cal.xml EX-101.CAL 109301
13 EX-101.LAB acls-20131231_lab.xml EX-101.LAB 1076883
14 EX-101.PRE acls-20131231_pre.xml EX-101.PRE 614916
15 EX-101.DEF acls-20131231_def.xml EX-101.DEF 328875
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 14660234
SIC: 3559 Special Industry Machinery, NEC