<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Crossfire by Rivet Software version 4.2.117.0 http://www.rivetsoftware.com-->
<!--Based on XBRL 2.1-->
<!--Created on: 10/27/2011 7:42:28 AM-->
<!--Modified on: 10/27/2011 7:42:28 AM-->
<schema xmlns="http://www.w3.org/2001/XMLSchema" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:cymi="http://www.cymer.com/20110930" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" targetNamespace="http://www.cymer.com/20110930" elementFormDefault="qualified" attributeFormDefault="unqualified" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:us-types="http://fasb.org/us-types/2011-01-31">
  <annotation>
    <appinfo>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/StatementConsolidatedBalanceSheets" id="StatementConsolidatedBalanceSheets">
        <link:definition>00100 - Statement - Consolidated Balance Sheets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/StatementConsolidatedStatementsOfOperations" id="StatementConsolidatedStatementsOfOperations">
        <link:definition>00200 - Statement - Consolidated Statements Of Operations</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/StatementConsolidatedStatementsOfComprehensiveIncome" id="StatementConsolidatedStatementsOfComprehensiveIncome">
        <link:definition>00300 - Statement - Consolidated Statements Of Comprehensive Income</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/StatementConsolidatedStatementsOfCashFlows" id="StatementConsolidatedStatementsOfCashFlows">
        <link:definition>00500 - Statement - Consolidated Statements Of Cash Flows</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureInventoriesScheduleOfInventoriesDetails" id="DisclosureInventoriesScheduleOfInventoriesDetails">
        <link:definition>40401 - Disclosure - Inventories (Schedule Of Inventories) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfOtherAssetsAndOtherLiabilitiesDetails" id="DisclosureBalanceSheetDetailsScheduleOfOtherAssetsAndOtherLiabilitiesDetails">
        <link:definition>40701 - Disclosure - Balance Sheet Details (Schedule Of Other Assets And Other Liabilities) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureComprehensiveIncomeLossComponentsOfAccumulatedOtherComprehensiveIncomeLossDetails" id="DisclosureComprehensiveIncomeLossComponentsOfAccumulatedOtherComprehensiveIncomeLossDetails">
        <link:definition>40901 - Disclosure - Comprehensive Income (Loss) (Components Of Accumulated Other Comprehensive Income (Loss)) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureAcquisitionPurchasePriceAndEstimatedFairValueOfAssetsAcquiredAndLiabilitiesAssumedDetails" id="DisclosureAcquisitionPurchasePriceAndEstimatedFairValueOfAssetsAcquiredAndLiabilitiesAssumedDetails">
        <link:definition>41402 - Disclosure - Acquisition (Purchase Price And The Estimated Fair Value Of The Assets Acquired And Liabilities Assumed) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DocumentDocumentAndEntityInformation" id="DocumentDocumentAndEntityInformation">
        <link:definition>00090 - Document - Document And Entity Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/StatementConsolidatedBalanceSheetsParenthetical" id="StatementConsolidatedBalanceSheetsParenthetical">
        <link:definition>00105 - Statement - Consolidated Balance Sheets (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/StatementConsolidatedStatementsOfComprehensiveIncomeParenthetical" id="StatementConsolidatedStatementsOfComprehensiveIncomeParenthetical">
        <link:definition>00305 - Statement - Consolidated Statements Of Comprehensive Income (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/StatementConsolidatedStatementOfEquity" id="StatementConsolidatedStatementOfEquity">
        <link:definition>00400 - Statement - Consolidated Statement Of Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureBasisOfPresentation" id="DisclosureBasisOfPresentation">
        <link:definition>10101 - Disclosure - Basis Of Presentation</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureFairValueMeasurements" id="DisclosureFairValueMeasurements">
        <link:definition>10201 - Disclosure - Fair Value Measurements</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureCashCashEquivalentsAndInvestments" id="DisclosureCashCashEquivalentsAndInvestments">
        <link:definition>10301 - Disclosure - Cash, Cash Equivalents And Investments</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureInventories" id="DisclosureInventories">
        <link:definition>10401 - Disclosure - Inventories</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureGoodwill" id="DisclosureGoodwill">
        <link:definition>10501 - Disclosure - Goodwill</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivities" id="DisclosureDerivativeInstrumentsAndHedgingActivities">
        <link:definition>10601 - Disclosure - Derivative Instruments And Hedging Activities</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureBalanceSheetDetails" id="DisclosureBalanceSheetDetails">
        <link:definition>10701 - Disclosure - Balance Sheet Details</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureEquity" id="DisclosureEquity">
        <link:definition>10801 - Disclosure - Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureComprehensiveIncomeLoss" id="DisclosureComprehensiveIncomeLoss">
        <link:definition>10901 - Disclosure - Comprehensive Income (Loss)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureEarningsPerShareeps" id="DisclosureEarningsPerShareeps">
        <link:definition>11001 - Disclosure - Earnings Per Share ("EPS")</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureIncomeTaxes" id="DisclosureIncomeTaxes">
        <link:definition>11101 - Disclosure - Income Taxes</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureCommitmentsAndContingencies" id="DisclosureCommitmentsAndContingencies">
        <link:definition>11201 - Disclosure - Commitments And Contingencies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureSegmentOperations" id="DisclosureSegmentOperations">
        <link:definition>11301 - Disclosure - Segment Operations</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureAcquisition" id="DisclosureAcquisition">
        <link:definition>11401 - Disclosure - Acquisition</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureBasisOfPresentationPolicy" id="DisclosureBasisOfPresentationPolicy">
        <link:definition>20102 - Disclosure - Basis Of Presentation (Policy)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureFairValueMeasurementsTables" id="DisclosureFairValueMeasurementsTables">
        <link:definition>30203 - Disclosure - Fair Value Measurements (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureCashCashEquivalentsAndInvestmentsTables" id="DisclosureCashCashEquivalentsAndInvestmentsTables">
        <link:definition>30303 - Disclosure - Cash, Cash Equivalents And Investments (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureInventoriesTables" id="DisclosureInventoriesTables">
        <link:definition>30403 - Disclosure - Inventories (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureGoodwillTables" id="DisclosureGoodwillTables">
        <link:definition>30503 - Disclosure - Goodwill (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivitiesTables" id="DisclosureDerivativeInstrumentsAndHedgingActivitiesTables">
        <link:definition>30603 - Disclosure - Derivative Instruments And Hedging Activities (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureBalanceSheetDetailsTables" id="DisclosureBalanceSheetDetailsTables">
        <link:definition>30703 - Disclosure - Balance Sheet Details (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureEquityTables" id="DisclosureEquityTables">
        <link:definition>30803 - Disclosure - Equity (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureComprehensiveIncomeLossTables" id="DisclosureComprehensiveIncomeLossTables">
        <link:definition>30903 - Disclosure - Comprehensive Income (Loss) (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureEarningsPerShareepsTables" id="DisclosureEarningsPerShareepsTables">
        <link:definition>31003 - Disclosure - Earnings Per Share ("EPS") (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureCommitmentsAndContingenciesTables" id="DisclosureCommitmentsAndContingenciesTables">
        <link:definition>31203 - Disclosure - Commitments And Contingencies (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureSegmentOperationsTables" id="DisclosureSegmentOperationsTables">
        <link:definition>31301 - Disclosure - Segment Operations (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureAcquisitionTables" id="DisclosureAcquisitionTables">
        <link:definition>31403 - Disclosure - Acquisition (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureBasisOfPresentationDetails" id="DisclosureBasisOfPresentationDetails">
        <link:definition>40101 - Disclosure - Basis Of Presentation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureFairValueMeasurementsScheduleOfFinancialAssetsAndLiabilitiesExcludingCashBalancesMeasuredAtFairValueOnRecurringBasisDetails" id="DisclosureFairValueMeasurementsScheduleOfFinancialAssetsAndLiabilitiesExcludingCashBalancesMeasuredAtFairValueOnRecurringBasisDetails">
        <link:definition>40201 - Disclosure - Fair Value Measurements (Schedule Of Financial Assets And Liabilities (Excluding Cash Balances) Measured At Fair Value On A Recurring Basis) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureCashCashEquivalentsAndInvestmentsScheduleOfCashCashEquivalentsAndInvestmentsDetails" id="DisclosureCashCashEquivalentsAndInvestmentsScheduleOfCashCashEquivalentsAndInvestmentsDetails">
        <link:definition>40301 - Disclosure - Cash, Cash Equivalents And Investments (Schedule Of Cash, Cash Equivalents And Investments) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureCashCashEquivalentsAndInvestmentsScheduleOfContractualMaturitiesOfCashEquivalentsAndInvestmentsDetails" id="DisclosureCashCashEquivalentsAndInvestmentsScheduleOfContractualMaturitiesOfCashEquivalentsAndInvestmentsDetails">
        <link:definition>40302 - Disclosure - Cash, Cash Equivalents And Investments (Schedule Of Contractual Maturities Of Cash Equivalents And Investments) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureGoodwillDetails" id="DisclosureGoodwillDetails">
        <link:definition>40501 - Disclosure - Goodwill (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivitiesNarrativeDetails" id="DisclosureDerivativeInstrumentsAndHedgingActivitiesNarrativeDetails">
        <link:definition>40601 - Disclosure - Derivative Instruments And Hedging Activities (Narrative) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivitiesScheduleOfOutstandingNotionalAmountsOfForwardContractsDetails" id="DisclosureDerivativeInstrumentsAndHedgingActivitiesScheduleOfOutstandingNotionalAmountsOfForwardContractsDetails">
        <link:definition>40602 - Disclosure - Derivative Instruments And Hedging Activities (Schedule Of Outstanding Notional Amounts Of Forward Contracts) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivitiesGrossFairValueOfDerivativeInstrumentsInConsolidatedBalanceSheetsDetails" id="DisclosureDerivativeInstrumentsAndHedgingActivitiesGrossFairValueOfDerivativeInstrumentsInConsolidatedBalanceSheetsDetails">
        <link:definition>40603 - Disclosure - Derivative Instruments And Hedging Activities (Gross Fair Value Of Derivative Instruments In Consolidated Balance Sheets) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivitiesEffectOfDerivativeInstrumentsOnConsolidatedStatementsOfOperationsAndComprehensiveIncomeLossDetails" id="DisclosureDerivativeInstrumentsAndHedgingActivitiesEffectOfDerivativeInstrumentsOnConsolidatedStatementsOfOperationsAndComprehensiveIncomeLossDetails">
        <link:definition>40604 - Disclosure - Derivative Instruments And Hedging Activities (Effect Of Derivative Instruments On Consolidated Statements Of Operations And Comprehensive Income (Loss)) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureEquityNarrativeDetails" id="DisclosureEquityNarrativeDetails">
        <link:definition>40801 - Disclosure - Equity (Narrative) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureEquitySummaryOfTotalNumberOfSharesGrantedDetails" id="DisclosureEquitySummaryOfTotalNumberOfSharesGrantedDetails">
        <link:definition>40802 - Disclosure - Equity (Summary Of Total Number Of Shares Granted) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureEquityScheduleOfWeightedAverageAssumptionsUsedForStockOptionsGrantedDetails" id="DisclosureEquityScheduleOfWeightedAverageAssumptionsUsedForStockOptionsGrantedDetails">
        <link:definition>40803 - Disclosure - Equity (Schedule Of Weighted Average Assumptions Used For Stock Options Granted) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureEquityComponentsOfShareBasedCompensationExpenseDetails" id="DisclosureEquityComponentsOfShareBasedCompensationExpenseDetails">
        <link:definition>40804 - Disclosure - Equity (Components Of Share-Based Compensation Expense) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureEarningsPerShareepsReconciliationOfBasicAndDilutedEpsDetails" id="DisclosureEarningsPerShareepsReconciliationOfBasicAndDilutedEpsDetails">
        <link:definition>41001 - Disclosure - Earnings Per Share ("EPS") (Reconciliation Of Basic And Diluted EPS) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureIncomeTaxesDetails" id="DisclosureIncomeTaxesDetails">
        <link:definition>41101 - Disclosure - Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureCommitmentsAndContingenciesChangesInProductWarrantyAccrualDetails" id="DisclosureCommitmentsAndContingenciesChangesInProductWarrantyAccrualDetails">
        <link:definition>41201 - Disclosure - Commitments And Contingencies (Changes In Product Warranty Accrual) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureSegmentOperationsSegmentReportingInformationRelatedToOperatingSegmentsDetails" id="DisclosureSegmentOperationsSegmentReportingInformationRelatedToOperatingSegmentsDetails">
        <link:definition>41302 - Disclosure - Segment Operations (Segment Reporting Information Related To Operating Segments) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.cymer.com/taxonomy/role/DisclosureAcquisitionNarrativeDetails" id="DisclosureAcquisitionNarrativeDetails">
        <link:definition>41401 - Disclosure - Acquisition (Narrative) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbaseRef xlink:type="simple" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:href="cymi-20110930_cal.xml" xlink:title="Calculation Links, all" />
      <link:linkbaseRef xlink:type="simple" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:href="cymi-20110930_def.xml" xlink:title="Definition Links, all" />
      <link:linkbaseRef xlink:type="simple" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:href="cymi-20110930_lab.xml" xlink:title="Label Links, all" />
      <link:linkbaseRef xlink:type="simple" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:href="cymi-20110930_pre.xml" xlink:title="Presentation Links, all" />
    </appinfo>
  </annotation>
  <import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" />
  <import namespace="http://www.xbrl.org/2003/linkbase" schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" />
  <import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" />
  <import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" />
  <import namespace="http://fasb.org/us-roles/2011-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2011/elts/us-roles-2011-01-31.xsd" />
  <import namespace="http://xbrl.sec.gov/dei/2011-01-31" schemaLocation="http://xbrl.sec.gov/dei/2011/dei-2011-01-31.xsd" />
  <import namespace="http://www.xbrl.org/dtr/type/numeric" schemaLocation="http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd" />
  <import namespace="http://www.xbrl.org/dtr/type/non-numeric" schemaLocation="http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd" />
  <import namespace="http://fasb.org/us-gaap/2011-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2011/elts/us-gaap-2011-01-31.xsd" />
  <element id="cymi_DocumentAndEntityInformationAbstract" name="DocumentAndEntityInformationAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <element id="cymi_CashCashEquivalentsAndInvestmentsTextBlock" name="CashCashEquivalentsAndInvestmentsTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_ScheduleOfCashCashEquivalentsAndInvestmentsTableTextBlock" name="ScheduleOfCashCashEquivalentsAndInvestmentsTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_ScheduleOfContractualMaturitiesOfCashEquivalentsAndInvestmentsTableTextBlock" name="ScheduleOfContractualMaturitiesOfCashEquivalentsAndInvestmentsTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_ForeignCurrencyAxis" name="ForeignCurrencyAxis" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrldt:dimensionItem" abstract="true" xbrli:periodType="duration" />
  <element id="cymi_ForeignCurrencyDomain" name="ForeignCurrencyDomain" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_WarrantyExpendituresNetOfConsumedPartsReturned" name="WarrantyExpendituresNetOfConsumedPartsReturned" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="credit" />
  <element id="cymi_CymerMember" name="CymerMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_TczMember" name="TczMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_AsmlMember" name="AsmlMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_NikonMember" name="NikonMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_SamsungMember" name="SamsungMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_RestrictedStockUnitsRsuMember" name="RestrictedStockUnitsRsuMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_PerformanceBasedRestrictedStockUnitPrsuMember" name="PerformanceBasedRestrictedStockUnitPrsuMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_ShareBasedCompensationArrangementByShareBasedPaymentAwardPercentageOfSharesVestedYearly" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardPercentageOfSharesVestedYearly" nillable="true" type="num:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_ContractualMaturitiesOfCashEquivalentsAndInvestmentsTable" name="ContractualMaturitiesOfCashEquivalentsAndInvestmentsTable" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" abstract="true" xbrli:periodType="duration" />
  <element id="cymi_ContractualMaturitiesOfCashEquivalentsAndInvestmentsAxis" name="ContractualMaturitiesOfCashEquivalentsAndInvestmentsAxis" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrldt:dimensionItem" abstract="true" xbrli:periodType="duration" />
  <element id="cymi_ContractualMaturitiesOfCashEquivalentsAndInvestmentsDomain" name="ContractualMaturitiesOfCashEquivalentsAndInvestmentsDomain" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_DueAfterOneYearThroughFiveYearsMember" name="DueAfterOneYearThroughFiveYearsMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_DueInOneYearOrLessMember" name="DueInOneYearOrLessMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_ContractualMaturitiesOfCashEquivalentsAndInvestmentsCost" name="ContractualMaturitiesOfCashEquivalentsAndInvestmentsCost" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <element id="cymi_ContractualMaturitiesOfCashEquivalentsAndInvestmentsFairValue" name="ContractualMaturitiesOfCashEquivalentsAndInvestmentsFairValue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <element id="cymi_UsGovernmentSecuritiesMember" name="UsGovernmentSecuritiesMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentTotalNumberOfSharesGrantedTableTextBlock" name="ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentTotalNumberOfSharesGrantedTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_ShareBasedCompensationArrangementByShareBasedPaymentAwardSharesGrantsInPeriod" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardSharesGrantsInPeriod" nillable="true" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_EquityIncentivePlanMember" name="EquityIncentivePlanMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfEqualMonthlyInstallmentsInWhichBalanceVests" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfEqualMonthlyInstallmentsInWhichBalanceVests" nillable="true" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_RestatementAdjustmentTable" name="RestatementAdjustmentTable" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" abstract="true" xbrli:periodType="duration" />
  <element id="cymi_EdiagSolutionsMember" name="EdiagSolutionsMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_USDollarJapaneseYenMember" name="USDollarJapaneseYenMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_USDollarKoreanWonMember" name="USDollarKoreanWonMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_USDollarTaiwaneseDollarsMember" name="USDollarTaiwaneseDollarsMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_EurosUnitedStatesDollarMember" name="EurosUnitedStatesDollarMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_BalanceSheetDetailsAbstract" name="BalanceSheetDetailsAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <element id="cymi_BalanceSheetDetailsTextBlock" name="BalanceSheetDetailsTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_BusinessAcquisitionPresentValueOfFutureCashPayments" name="BusinessAcquisitionPresentValueOfFutureCashPayments" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <element id="cymi_PreferredStockHeldValue" name="PreferredStockHeldValue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <element id="cymi_RestrictedCashFairValueDisclosure" name="RestrictedCashFairValueDisclosure" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <element id="cymi_ConcentrationOfRiskPercentageOfTotalSalesFromOneCustomer" name="ConcentrationOfRiskPercentageOfTotalSalesFromOneCustomer" nillable="true" type="num:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_RecentAccountingPronouncementPolicyTextBlock" name="RecentAccountingPronouncementPolicyTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <element id="cymi_NewlyIssuedAccountingStandardsPolicyTextBlock" name="NewlyIssuedAccountingStandardsPolicyTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
</schema>
