Document and Entity Information (Abstract) Document and Entity Information Statement [Table] Statement [Line Items] Document Type Amendment Flag Document Period End Date Document Fiscal Year Focus Document Fiscal Period Focus Trading Symbol Entity Registrant Name Entity Central Index Key Current Fiscal Year End Date Entity Filer Category Entity Common Stock, Shares Outstanding Consolidated Balance Sheets ASSETS Current assets: Cash and cash equivalents Cash and cash equivalents at end of the period Cash and cash equivalents at beginning of the period Cash and Cash Equivalents, at Carrying Value, Total Short-term investments Short-term Investments, Total Accounts receivable, net Accounts receivable, net Accounts Receivable, Net, Current, Total Inventory, Net Inventory, Net, Total Inventories Deferred Tax Assets Net Current Deferred Tax Assets, Net, Current, Ending Balance Deferred Tax Assets, Net, Current, Beginning Balance Deferred income taxes Deferred Tax Assets, Net, Current, Total Other current assets Total current assets Total current assets Long-term investments Long-term Investments, Total Property, plant and equipment, net Property, Plant and Equipment, Net, Ending Balance Property, Plant and Equipment, Net, Beginning Balance Property, plant and equipment, net Property, Plant and Equipment, Net, Total Deferred income taxes Deferred Tax Assets, Net, Noncurrent, Total Goodwill Goodwill, Ending Balance Goodwill, Beginning Balance Intangible assets, net Intangible assets, net Intangible Assets, Net (Excluding Goodwill), Total Other assets Other Assets, Noncurrent, Total Total assets Total assets LIABILITIES Current liabilities: Accounts Payable, Current Accounts Payable, Current, Total Accounts payable Deferred Revenue, Current Deferred Revenue, Current, Total Deferred revenue Other current liabilities Other Liabilities, Current, Total Total current liabilities Total current liabilities Deferred Revenue, Noncurrent Deferred Revenue, Noncurrent, Total Deferred revenue Deferred Tax Liabilities Noncurrent Deferred income taxes Other Liabilities Noncurrent Other Liabilities, Noncurrent, Total Other liabilities Total liabilities Total liabilities Stockholders' Equity, Including Portion Attributable to Noncontrolling Interest [Abstract] EQUITY Cymer, Inc. stockholders' equity: Preferred stock, authorized 5,000,000 shares; $.001 par value; no shares issued or outstanding Preferred Stock, Value, Issued, Ending Balance Preferred Stock, Value, Issued, Beginning Balance Preferred stock Preferred Stock, Value, Issued, Total Common stock, authorized 100,000,000 shares; $.001 par value; 43,232,000 shares issued and 29,820,000 shares outstanding at December 31, 2010; 42,751,000 shares issued and 29,899,000 shares outstanding at December 31, 2009 Common Stock, Value, Issued, Ending Balance Common Stock, Value, Issued, Beginning Balance Common stock Common Stock, Value, Issued, Total Additional Paid in Capital, Common Stock Additional Paid in Capital, Common Stock, Ending Balance Additional Paid in Capital, Common Stock, Beginning Balance Additional paid-in capital Treasury stock at cost (13,412,000 and 12,852,000 common shares at June 30, 2010 and December 31, 2009, respectively) Treasury stock Treasury Stock, Value, Ending Balance Treasury Stock, Value, Beginning Balance Accumulated Other Comprehensive Income (Loss), Net of Tax Accumulated Other Comprehensive Income (Loss), Net of Tax, Ending Balance Accumulated Other Comprehensive Income (Loss), Net of Tax, Beginning Balance Accumulated Other Comprehensive Income (Loss), Net of Tax, Total Accumulated other comprehensive loss Retained Earnings (Accumulated Deficit) Retained Earnings (Accumulated Deficit), Ending Balance Retained Earnings (Accumulated Deficit), Beginning Balance Retained Earnings (Accumulated Deficit), Total Retained earnings Total equity Balance Balance Total equity Total liabilities and equity Total liabilities and equity Consolidated Statements of Operations Revenues: Total revenues Revenue Total revenues Cost of revenues Cost of revenue Cost of Revenue, Total Gross Profit Gross profit Operating expenses: Research and development Research and Development Expense, Total Sales and marketing Selling and Marketing Expense, Total General and administrative General and Administrative Expense, Total Total operating expenses Total operating expenses Operating Income (Loss) Operating income Other income (expense): Foreign currency exchange loss Foreign currency exchange gain Foreign Currency Transaction Gain (Loss), before Tax, Total Interest income Interest and other expense Interest expense Interest Expense, Total Other income (expense) Other income Other Nonoperating Income (Expense), Total Total other income (expense) - net Total other income (expense) Income (loss) before income tax expense (benefit) Income before income taxes Income tax expense Income Tax Expense (Benefit), Total Net income Net income Net income Net loss attributable to noncontrolling interest in subsidiary Net loss attributable to noncontrolling interest in subsidiary Net Income (Loss) Attributable to Noncontrolling Interest, Total Net income (loss) attributable to Cymer, Inc. Net income attributable to Cymer, Inc. Earnings per Share ("EPS") Earnings per share: Basic Earnings Per Share, Basic, Total Earnings Per Share Diluted Diluted Earnings Per Share, Diluted, Total Weighted average shares outstanding: Weighted Average Number Of Shares Outstanding Basic Basic Weighted Average Number of Shares Outstanding, Basic, Total Diluted Weighted Average Number of Shares Outstanding, Diluted, Total Consolidated Statements of Comprehensive Income Other comprehensive income (loss): Other comprehensive income: Foreign currency translation adjustments Other Comprehensive Income, Foreign Currency Transaction and Translation Adjustment, Net of Tax, Total Unrealized losses on available for sale investments, net of income tax benefit of $7, $97, and $42 Unrealized gains on available-for-sale investments, net of tax Other Comprehensive Income, Available-for-sale Securities Adjustment, Net of Tax, Total Unrealized gains (losses) on available for sale investments, net of income tax expense (benefit) of $6 and ($15) for 2011 and 2010, respectively Unrealized (losses) gains on foreign currency forward exchange contracts, net of income tax (benefit) expense of $(42), $154, and $(173) Unrealized losses on forward exchange contracts, net of tax Unrealized (losses) gains on foreign currency forward exchange contracts, net of income tax (benefit) expense of ($3) and $27 for 2011 and 2010, respectively Unrealized pension (losses) gains, net of income tax (benefit) expense of $(65), $(43), and $21, respectively Unrealized pension losses, net of tax Unrealized pension gains, net of tax Total other comprehensive income (loss) Total other comprehensive income (loss) Comprehensive income (loss) Comprehensive income Comprehensive loss attributable to noncontrolling interest in subsidiary Comprehensive loss attributable to noncontrolling interest in subsidiary Comprehensive Income, Net of Tax, Attributable to Noncontrolling Interest, Total Comprehensive income (loss) attributable to Cymer, Inc. Comprehensive income attributable to Cymer, Inc. Unrealized gains (losses) on available for sale investments, income tax expense (benefit) Other Comprehensive Income, Available-for-sale Securities, Tax, Total Unrealized (losses) gains on foreign currency forward exchange contracts, income tax (benefit) expense Consolidated Statement of Equity Statement, Equity Components [Axis] Equity Component [Domain] Common Stock [Member] Additional Paid-in Capital [Member] Treasury Stock [Member] Accumulated Other Comprehensive Loss [Member] Retained Earnings [Member] Balance (in shares) Balance (in shares) Balance (in shares) Exercise of common stock options Exercise of common stock options (in shares) Exercise of common stock options Stock Issued During Period, Value, Restricted Stock Award, Net of Forfeitures Stock Issued During Period, Value, Restricted Stock Award, Net of Forfeitures, Total Issuance of shares upon vesting of restricted stock unit awards Issuance of shares upon vesting of restricted stock unit awards Issuance of shares upon vesting of restricted stock unit awards (in shares) Stock Issued During Period, Shares, Restricted Stock Award, Net of Forfeitures, Total Employee stock-based compensation Income tax shortfall/benefit from stock option exercises Income tax benefit from stock option exercises Consolidated Statements of Cash Flows Operating activities: Adjustments to reconcile net income to net cash provided by (used in) operating activities: Depreciation, amortization and accretion Depreciation, Depletion and Amortization, Total Stock-based compensation Share-based Compensation, Total Bad debt expense Bad debt expense Bad debt recoveries Excess Tax Benefit from Share-based Compensation, Operating Activities Excess tax benefits from stock option exercises Provision for deferred income taxes Deferred Income Tax Expense (Benefit), Total Loss on disposal and impairment of property and equipment Loss on disposal or impairment of property, plant and equipment Gain (Loss) on Sale of Property Plant Equipment, Total Change in assets and liabilities: Increase (Decrease) in Restricted Cash for Operating Activities Restricted cash Increase Decrease In Accounts Receivable Accounts receivable Accounts receivable Increase (Decrease) in Accounts Receivable, Related Parties Accounts receivable, related party Increase (Decrease) in Inventories Inventories Increase (Decrease) in Inventories, Total Increase (Decrease) in Other Operating Assets Other assets Other assets Increase (Decrease) in Accounts Payable Increase (Decrease) in Accounts Payable, Total Accounts payable Increase (Decrease) in Accounts Payable, Related Parties Accounts payable, related party Increase (Decrease) in Deferred Revenue Deferred revenue Increase (Decrease) in Other Operating Liabilities Other liabilities Other liabilities Net cash (used in) provided by operating activities Net cash provided by (used in) operating activities Investing activities: Acquisition of property and equipment Acquisition of property, plant and equipment Payments to Acquire Property, Plant, and Equipment, Total Purchases of investments Purchases of investments Payments to Acquire Investments, Total Proceeds from sold or matured investments Proceeds from Sale, Maturity and Collections of Investments, Total Net cash used in investing activities Net cash (used in) provided by investing activities Financing activities: Proceeds from issuance of common stock Purchase of noncontrolling interest Purchase of noncontrolling interest Excess tax benefits from stock option exercises Excess tax benefits from stock option exercises The cash outflow during the period from the repayment of aggregate short-term and long-term debt and payment of capital lease obligations. 0 The cash outflow during the period from the repayment of aggregate short-term and long-term debt and payment of capital lease obligations. 0 The cash outflow during the period from the repayment of aggregate short-term and long-term debt and payment of capital lease obligations Repayments of Debt and Capital Lease Obligations Payments under capital lease obligations Payments under capital lease obligations Net cash used in financing activities Net cash provided by financing activities Effect of exchange rate changes on cash and cash equivalents Effect of Exchange Rate on Cash and Cash Equivalents, Total Net decrease in cash and cash equivalents Net increase (decrease) in cash and cash equivalents Supplemental disclosure of cash flow information: Interest paid Income taxes paid Supplemental disclosure of non-cash operating, investing and financing activities: Net (decrease) increase in acquisition of property and equipment included in accounts payable Net increase in in-transit proceeds from issuance of common stock Net (decrease) increase in in-transit proceeds from issuance of common stock Capital Lease Obligations Incurred Property and equipment acquired under capital lease obligations Basis of Presentation Organization Consolidation And Presentation Of Financial Statements Disclosure Text Block Basis of Presentation Inventories Inventory Disclosure [Text Block] Inventories Fair Value Disclosures [Abstract] Fair Value Measurements Fair Value Measurement Inputs Disclosure Text Block Fair Value Measurements FAIR VALUE MEASUREMENTS Cash, Cash Equivalents and Investments Cash Cash Equivalents And Investments Text Block Cash Cash Equivalents And Investments Text Block Cash, Cash Equivalents and Investments Derivative Instruments and Hedging Activities Derivative Instruments And Hedging Activities Disclosure Text Block Derivative Instruments and Hedging Activities Other Liabilities [Abstract] Other Liabilities Other Liabilities Disclosure [Text Block] Other Liabilities Equity Stockholders' Equity Note Disclosure [Text Block] Equity Comprehensive Loss Comprehensive Income Note [Text Block] Comprehensive Loss EARNINGS (LOSS) PER SHARE Earnings per Share ("EPS") Income Taxes Income Tax Disclosure Text Block INCOME TAXES Income Taxes Commitments And Contingencies Disclosure [Abstract] Commitments and Contingencies Commitments And Contingencies Disclosure Text Block COMMITMENTS AND CONTINGENCIES Commitments and Contingencies Segment Operations Segment Reporting Disclosure Text Block Segment Operations Subsequent Events [Abstract] Subsequent Events Schedule of Subsequent Events [Text Block] Subsequent Events