EXHIBIT 21

ESI Subsidiaries

As of March 31, 2012

Name	State/ Country  of Incorporation	Percentage of Voting Securities Owned
Electro Scientific Industries GmbH	Germany		100	%
ESI International Corp.	Oregon		100	%
Electro Scientific Industries Japan Co., Ltd.	Japan		100	%
ESI Korea Co. Ltd.	Korea		100	%
Electro Scientific Industries Europe Ltd.	United Kingdom		100	%
Electro Scientific Industries, SARL	France		100	%
Electro Scientific Industries Singapore PTE Ltd.	Singapore		100	%
ESI China, Inc.	Oregon		100	%
ESI Electronic Equipment (Shanghai) Co., Ltd.	China		100	%
ESI (Beijing) R&D Center Co., Ltd.	China		100	%
ESI Technology Development, Pte. Ltd.	Singapore		100	%
ESI China R&D Investment, Pte. Ltd.	Singapore		100	%
ESI Taiwan (Branch Office)	Taiwan		100	%
ESI (Beijing) Electro Optic Manufacturing Co. Ltd.	China		100	%
New Wave Research, Inc.	California		100	%
ESI-Pyrophotonics Lasers, Inc.	Canada		100	%