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Exhibit 21.1

Subsidiaries of the Registrant

Name	State or Jurisdiction of Organization
Accuray Accelerator Technology (Chengdu) Company Limited		China
Accuray Asia Ltd.		Hong Kong
Accuray Belgium BVBA		Belgium
Accuray Brazil Commercio, Importacao, e Exportacao, de Equipamentos Medicos Ltda.		Brazil
Accuray Cayman Islands		Cayman Islands
Accuray Europe SAS		France
Accuray Europe Dubai Branch		United Arab Emirates
Accuray International Sarl		Switzerland
Accuray Italy Srl		Italy
Accuray Japan K.K.		Japan
Accuray Medical Equipment (Canada) Ltd.		Canada
Accuray Medical Equipment GmbH		Germany
Accuray Medical Equipment (India) Private Limited		India
Accuray Medical Equipment (Rus) LLC.		Russia
Accuray Medical Equipment (SEA) Private Limited		Singapore
Accuray Medical Equipment (Shanghai) Co., Ltd.		China
Accuray Mexico S.A. DE C.V.		Mexico
Accuray Netherlands BV		Netherlands
Accuray Spain, S.L.U.		Spain
Accuray Tibbi Cihazlar Ve Malzemeler Ithalat Ihracat Anonim Sirketi		Turkey
Accuray UK, Ltd.		United Kingdom
TomoTherapy Europe Sarl		Switzerland
TomoTherapy Germany GmbH		Germany
TomoTherapy Incorporated		USA
TomoTherapy Spain, S.L.		Spain
TomoTherapy UK, Ltd		United Kingdom
Morphormics, Inc.		USA

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Exhibit 21.1

Subsidiaries of the Registrant