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Exhibit 21.1

Subsidiaries of the Registrant

Name	State or Jurisdiction of Organization
Accuray Asia Ltd.		Hong Kong
Accuray Belgium BVBA		Belgium
Accuray Brazil Commercio, Importacao, e Exportacao, de Equipamentos Medicos Ltda.		Brazil
Accuray Cayman Islands		Cayman Islands
Accuray Europe SAS		France
Accuray International SARL		Switzerland
Accuray Italy Srl		Italy
Accuray Japan K.K.		Japan
Accuray Medical Equipment (Canada) Ltd.		Canada
Accuray Medical Equipment GmbH		Germany
Accuray Medical Equipment (India) Private Limited		India
Accuray Medical Equipment (Rus) LLC.		Russia
Accuray Medical Equipment (SEA) Private Limited		Singapore
Accuray Medical Equipment (Shanghai) Co., Ltd.		China
Accuray Mexico S.A. DE C.V.		Mexico
Accuray Netherlands BV		Netherlands
Accuray Spain, S.L.U.		Spain
Accuray Tibbi Cihazlar Ve Malzemeler Ithalat Ihracat Anonim Sirketi		Turkey
Accuray UK, Ltd.		United Kingdom
Chengdu Twin Peak Accelerator Incorporated (Wholly Foreign Owned Enterprise)		China
TomoTherapy Asia Pacific Hong Kong Ltd		Hong Kong
TomoTherapy Europe GmbH		Switzerland
TomoTherapy France SARL		France
TomoTherapy Germany GmbH		Germany
TomoTherapy Incorporated		USA
TomoTherapy Spain		Spain
TomoTherapy UK, Ltd		United Kingdom

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Exhibit 21.1

Subsidiaries of the Registrant