SEC Seal
SEC Banner
Search the Next-Generation EDGAR System
Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]
SEC Accession No. 0001104659-13-037564
Filing Date
2013-05-06
Accepted
2013-05-06 15:01:19
Documents
11
Period of Report
2013-03-31
Filing Date Changed
2013-05-06

Document Format Files

Seq Description Document Type Size
1 10-Q a13-8326_110q.htm 10-Q 625740
2 EX-31.1 a13-8326_1ex31d1.htm EX-31.1 13020
3 EX-31.2 a13-8326_1ex31d2.htm EX-31.2 13047
4 EX-32.1 a13-8326_1ex32d1.htm EX-32.1 5198
5 EX-32.2 a13-8326_1ex32d2.htm EX-32.2 5197
  Complete submission text file 0001104659-13-037564.txt   4828265

Data Files

Seq Description Document Type Size
6 XBRL INSTANCE DOCUMENT acls-20130331.xml EX-101.INS 343584
7 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20130331.xsd EX-101.SCH 71841
8 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20130331_cal.xml EX-101.CAL 51070
9 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20130331_lab.xml EX-101.LAB 1176828
10 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20130331_pre.xml EX-101.PRE 554325
11 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20130331_def.xml EX-101.DEF 264956
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 13815729
SIC: 3559 Special Industry Machinery, NEC
Assistant Director 10