SEC FORM 3

SEC Form 3

FORM 3

UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934
or Section 30(h) of the Investment Company Act of 1940

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1. Name and Address of Reporting Person^*

MORATH CHRISTOPHER J

(Last)

(First)

(Middle)

C/O RUDOLPH TECHNOLOGIES INC.

ONE RUDOLPH RD, P.O. BOX 1000

(Street)

FLANDERS

07836

(City)

(State)

(Zip)

2. Date of Event Requiring Statement (Month/Day/Year)
08/08/2007

3. Issuer Name and Ticker or Trading Symbol
RUDOLPH TECHNOLOGIES INC [ RTEC ]

4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)

Director		10% Owner
Officer (give title below)	X	Other (specify below)
		VP, Operations, MBU

5. If Amendment, Date of Original Filed (Month/Day/Year)

6. Individual or Joint/Group Filing (Check Applicable Line)

X	Form filed by One Reporting Person
	Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Beneficially Owned
1. Title of Security (Instr. 4)	2. Amount of Securities Beneficially Owned (Instr. 4)	3. Ownership Form: Direct (D) or Indirect (I) (Instr. 5)	4. Nature of Indirect Beneficial Ownership (Instr. 5)
Common Stock	380	D
Common Stock - Restricted Stock Unit⁽¹⁾	5,400⁽²⁾	D

Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 4)	2. Date Exercisable and Expiration Date (Month/Day/Year)		3. Title and Amount of Securities Underlying Derivative Security (Instr. 4)		4. Conversion or Exercise Price of Derivative Security	5. Ownership Form: Direct (D) or Indirect (I) (Instr. 5)	6. Nature of Indirect Beneficial Ownership (Instr. 5)
1. Title of Derivative Security (Instr. 4)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares	4. Conversion or Exercise Price of Derivative Security	5. Ownership Form: Direct (D) or Indirect (I) (Instr. 5)	6. Nature of Indirect Beneficial Ownership (Instr. 5)
Incentive Stock Option (right to buy)	11/11/2004⁽³⁾	11/10/2009	Common Stock	23,438	$16	D
Non-Qualified Stock Option (right to buy)	04/14/2005⁽⁴⁾	10/17/2012	Common Stock	2,500	$14.62	D
Non- Qualified Stock Option (right to buy)	11/11/2004⁽³⁾	11/10/2009	Common Stock	7,107	$16	D
Non-Qualified Stock Option (right to buy)	04/14/2005⁽⁴⁾	02/28/2014	Common Stock	1,500	$21.13	D
Non-Qualified Stock (right to buy)	04/14/2005⁽⁴⁾	09/01/2013	Common Stock	2,500	$22.25	D
Non-Qualified Stock Options (right to buy)	04/14/2005⁽⁴⁾	10/18/2011	Common Stock	4,500	$23.4	D
Non-Qualified Stock Option (right to buy)	04/14/2005⁽⁴⁾	07/23/2010	Common Stock	20,000	$37.31	D

Explanation of Responses:

1. Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock.

2. 20% of the share of Common Stock subject to the Restricted Stock Unit vest each year on the grant date Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

3. 20% of the shares of common stock subject to the Option becomes excercisable twelve months after the date the Option was granted and 1/60th of the shares of Common Stock subject to the Option vest each month thereafter.

4. 20% of the shares of Common Stock subject to the Option became excercisable twelve months after the date the Option was granted and 1/60th of the shares of Common Stock subject to the Option vested each month therafter.However, the Option became vested in full on April 14,2005 due to accelerated vesting

	/s/ Christopher J. Morath	08/17/2007
	** Signature of Reporting Person	Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 5 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.